10 inch Perfluorinated (PFA) filter

10 inch Perfluorinated (PFA) filter

This is a chemical filter used in semiconductor chemical equipment. The housing connector is integrally molded with the head and cartridge, which reduces the space required for assembly.
  • Product features
  • 1. The perfluorinated filter has very good temperature resistance and corrosion resistance
    2. Ultra-clean PFA material ensures the cleanliness of the inner filter
    3. Low metal ion precipitation to avoid liquid pollution
  • Industry Application
  • 1. Suitable for filtering high temperature and highly corrosive chemicals
    2.Perfluorinated filters are generally installed in semiconductor manufacturing wet process equipment to filter wet chemicals such as acids and alkalis.
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PRODUCT DESCRIPTION
  • Maximum operating pressure:
  • 0.3 Mpa @ 100℃/0.75 Mpa @ 25℃
  • Maximum operating temperature:
  • 100°C
  • Chemical compatibility (Locking ring)

  • PVDF:
  • H₂SO₄、H₃PO₄、HNO₃ :
  • ×
  • H₂O₂:
  • ×
  • NH₄OH、TMAH、KOH:
  • ×
  • IPA、DMSO:
  • ×
  • Connection specifications:
  • Inlet/outlet: 3/4 Vent: 2-1/2 Drain valve: 1/2

Appearance

Installation Notes

1.Loosen the upper cover nut and take out the filter body             2.Install the filter element into the filter cover


3. Install the filter body into the filter cover             4.Use the matching wrench to tighten the upper cover nut

Ordering Information
  • Series
  • Perfluorinated filter
  • Body
  • PFA=quantity:1
  • Upper cover
  • PFA=quantity:1
  • Upper cover nut
  • PVDF=quantity:1
  • Socket nut
  • PFA=quantity:5
  • O-Ring
  • FFKM=quantity:1
  • Bolts and nuts
  • PVDF=quantity:4
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